Design and testing of a compliant mechanism-based XYθ stage for micro/nanopositioning
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DOI: 10.1080/14484846.2020.1786653
Abstract: A compliant mechanism-based micro/nanopositioning stages are used to perform high precision motion in various fields. In recent years, researches proposed various methods to achieve the compliant m... read more here.
Keywords: mechanism based; micro nanopositioning; compliant mechanism;
Characteristic analysis of a micro-/nanopositioning stage with coupling errors by the gravity
Sign Up to like & getrecommendations! Published in 2019 at "Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science"
DOI: 10.1177/0954406219850592
Abstract: The piezo-actuated micro-/nanopositioning stages are often used in the current precision engineering applications, and the coupling deformation under the gravity of the stage is critical to error analysis. Considering the torsional deformation and bending deformation… read more here.
Keywords: nanopositioning stage; analysis; deformation; micro nanopositioning ... See more keywords