Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment
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DOI: 10.1016/j.crci.2018.01.009
Abstract: Abstract Fluorine cold plasmas produced by an electrical discharge in SF6, CF4, CHF3 or C4F8 gases, principally, have two main fields of application. The first and historical application is etching of materials for microelectronics and… read more here.
Keywords: plasmas; surface treatment; surface; micro nanotechnology ... See more keywords