Micro-opto-electro-mechanical systems accelerometer based on the Talbot effect of double-layer diffraction gratings.
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DOI: 10.1364/ao.457479
Abstract: In this paper, we present the design, fabrication, and test of a micro-opto-electro-mechanical systems (MOEMS) accelerometer based on the Talbot effect of double-layer diffraction gratings. The detection of acceleration is realized by using the highly… read more here.
Keywords: double layer; opto electro; layer; electro mechanical ... See more keywords