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Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-016-3048-3
Abstract: AbstractCompliant micro-positioning platforms are necessary for highly precise applications. Measurements of the displacement and reinforcements of the stiffness are two major concerns of any compliant micro-positioning platform. This paper proposes a compliant micro-positioning platform (CMPP)…
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Keywords:
viscoelastic damper;
platform;
micro positioning;
strain gauges ... See more keywords
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Published in 2020 at "Microsystem Technologies"
DOI: 10.1007/s00542-020-04830-9
Abstract: As the current trend in numerous industrial domains is to miniaturise products, micro-positioning stage(MPS) capable of performing micro-manipulation and micro-assembly tasks with sub-micrometer or nanometer precision is playing an increasing important role in these fields.…
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Keywords:
micro positioning;
micro;
flexure based;
positioning stage ... See more keywords
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Published in 2018 at "Mechanism and Machine Theory"
DOI: 10.1016/j.mechmachtheory.2017.11.021
Abstract: Abstract This paper presents an analytical model that can be utilized in the design and optimization of a 2-DOF micro-positioning stage using corrugated flexure (CF) units. Stiffness components of the CF beam and the middle…
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Keywords:
dof micro;
stage using;
micro positioning;
positioning stage ... See more keywords