Study on Estimation Method for Maximum Temperature of Multi-layered Micro-probe by Joule-Heating
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DOI: 10.1007/s12541-020-00392-y
Abstract: In this study, a method which would improve reliability of coated vertical type micro-probe under Joule heating is described. The method is to decouple the mechanical and electrical characteristics of a probe. That is, the… read more here.
Keywords: probe joule; micro probe; maximum temperature; probe ... See more keywords