Design and experiment of an electromagnetic levitation system for a micro mirror
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DOI: 10.1007/s00542-019-04452-w
Abstract: In this paper, the design and characterization of a contactless electromagnetic levitation and electrostatic driven microsystem is presented, which has applications for example for large scale angle rotation micro mirrors. The proposed design can levitate… read more here.
Keywords: micro rotor; design; micro; electromagnetic levitation ... See more keywords