Extracting optical constants of solid materials with micro-rough surfaces from ellipsometry without using effective medium approximation.
Sign Up to like & getrecommendations! Published in 2019 at "Optics express"
DOI: 10.1364/oe.27.017667
Abstract: The effective medium approximation (EMA) model may cause a large deviation in the data analysis of spectroscopic ellipsometry (SE) for solid materials with randomly micro-rough surfaces since it ignores the influence of the lateral irregularities… read more here.
Keywords: effective medium; medium approximation; rough surfaces; optical constants ... See more keywords