Wafer-level vacuum package of two-dimensional micro-scanner
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3668-2
Abstract: We present wafer-level vacuum package of two-dimensional (2-D) micro-scanner based on glass-silicon anodic bonding. To form the sacrificial gap for evacuating air in the package cavity before hermetically sealed, the reflow process of Au/Sn/Cr posts… read more here.
Keywords: package; wafer level; scanner; vacuum ... See more keywords
Swept-source optical coherence tomography microsystem with an integrated Mirau interferometer and electrothermal micro-scanner.
Sign Up to like & getrecommendations! Published in 2018 at "Optics letters"
DOI: 10.1364/ol.43.004847
Abstract: In the rapid evolution of gastrointestinal endomicroscopy, optical coherence tomography (OCT) has found many diverse applications. Until recently, the micro-opto-electro-mechanical systems (MOEMS) technology has been playing a key role in shaping the miniaturization of these… read more here.
Keywords: optical coherence; micro scanner; microsystem; swept source ... See more keywords