Integrated Micro Sensor Based on Grating Interferometer: A Review
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2024.3507084
Abstract: Sensors based on optical interferometric displacement measurement have the outstanding advantage of high sensitivity and are widely applied in various measurement fields. In particular, with the development of micro-opto-electromechanical system technology, grating-interferometer-based sensors have drawn… read more here.
Keywords: micro sensor; grating interferometer; based grating; integrated micro ... See more keywords
CHARACTERIZATION AND MITIGATION OF ELECTRO-STATIC BONDING FAILURES IN MICROSENSORS
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DOI: 10.21917/ijme.2017.0060
Abstract: Electrostatic bonding between glass and silicon is carried out in micro sensor devices to achieve higher bond strength thus eliminating the requirement of adhesives. This can also be useful in providing hermiticity and results in… read more here.
Keywords: methodology; bonding; process; micro sensor ... See more keywords