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Published in 2019 at "Renewable Energy"
DOI: 10.1016/j.renene.2018.09.075
Abstract: Abstract By using micro-electro-mechanical systems (MEMS), this work develops flexible four-in-one (temperature, voltage, current and flow) micro sensors on a flexible substrate. The flexible four-in-one micro sensors use polyimide as the protective layer, owing to…
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Keywords:
four one;
flexible four;
micro sensors;
temperature ... See more keywords
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0
Published in 2018 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2018.2850372
Abstract: In this paper, temperature and humidity sensors with dimensions less than $1 \times 1$ mm2 are printed together on a flexible polyimide substrate to create a miniaturized sensing circuit. The humidity changes (RH 35%–95%) are…
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Keywords:
detection;
temperature;
micro sensors;
printed micro ... See more keywords
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2
Published in 2023 at "Polymers"
DOI: 10.3390/polym15051066
Abstract: In this study, novel flexible micro-scale humidity sensors were directly fabricated in graphene oxide (GO) and polyimide (PI) using ion beam writing without any further modifications, and then successfully tested in an atmospheric chamber. Two…
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Keywords:
humidity;
spectroscopy;
micro sensors;
beam writing ... See more keywords