Geometric Imperfection Characterization and Precise Assembly of Micro Shell Resonators
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.2974513
Abstract: Micro glassblowing can be utilized in the fabrication of high-precision micro shell resonator due to its acceptable cost and promising performance. Geometric imperfection characterization and electrode assembly are important but challenging tasks for manufacturing high-quality… read more here.
Keywords: imperfection characterization; shell; micro shell; geometric imperfection ... See more keywords
Fused Silica Micro Shell Resonators by a Wafer-Level Thermal Reflow Process
Sign Up to like & getrecommendations! Published in 2025 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2024.3478842
Abstract: This article demonstrates a low-cost micro shell resonator forming by the wafer-level negative pressure driven reflow process. Negative pressure in the sealed mold cavity of the bonded fused silica (FS) wafers is used as the… read more here.
Keywords: process; shell; micro shell; wafer level ... See more keywords
Effect of applied electric potential and micro length scale parameters on the electroelastic analysis of three-layered shear deformable micro-shell
Sign Up to like & getrecommendations! Published in 2021 at "Smart Structures and Systems"
DOI: 10.12989/sss.2021.28.3.305
Abstract: This paper uses higher-order shear deformation theory and modified couple stress theory (MCST) to the electroelastic results of FG micro-shell integrated with piezoelectric thin sheets subjected to electrical and mechanical loads rested on Pasternak's foundation.… read more here.
Keywords: length scale; micro length; micro; applied electric ... See more keywords
Pulsating flow induced parametric instabilities of a smart embedded micro-shell based on nonlocal piezoelasticity theory
Sign Up to like & getrecommendations! Published in 2018 at "Scientia Iranica"
DOI: 10.24200/sci.2018.50293.1627
Abstract: In this study, the dynamical instabilities of an embedded smart micro-shell conveying pulsating fluid flow is investigated based on nonlocal piezoelasticity theory and nonlinear cylindrical shell model. The micro-shell is surrounded by an elastic foundation… read more here.
Keywords: theory; based nonlocal; micro; shell ... See more keywords