Articles with "micro test" as a keyword



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A Micro-Test Structure for the Thermal Expansion Coefficient of Metal Materials

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Published in 2017 at "Micromachines"

DOI: 10.3390/mi8030070

Abstract: An innovative micro-test structure for detecting the thermal expansion coefficient (TEC) of metal materials is presented in this work. Throughout this method, a whole temperature sensing moveable structures are supported by four groups of cascaded… read more here.

Keywords: thermal expansion; test; metal; micro test ... See more keywords