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Published in 2021 at "Nano letters"
DOI: 10.1021/acs.nanolett.1c02972
Abstract: The microbolometer is the cornerstone device for imaging in the long-wavelength infrared range (LWIR) at room temperature. The state-of-the-art commercial microbolometers usually have a large thermal time constant (TTC) of over 10 ms, limited by…
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Keywords:
long wavelength;
microbolometer;
silicon nanomembrane;
wavelength infrared ... See more keywords
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Published in 2020 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2020.2992991
Abstract: This paper presents the realization of a single layer microbolometer pixel fabricated using only ZnO material coated with atomic layer deposition. Due to the stress-free nature and high temperature coefficient of resistance of the ALD…
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Keywords:
single layer;
microbolometer;
layer;
zno material ... See more keywords
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Published in 2020 at "Micromachines"
DOI: 10.3390/mi11090800
Abstract: The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The fabrication of the CMOS-compatible microbolometer infrared focal plane arrays (IRFPAs) is based on the combination…
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Keywords:
microbolometer;
cost microbolometer;
low cost;
microbolometer type ... See more keywords