Performance improvement of Y-doped VOx microbolometers with nanomesh antireflection layer.
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DOI: 10.1364/oe.386438
Abstract: In the study, the yttrium (Y)-doped vanadium oxide (VOx:Y) films used as the sensitive layers of microbolometers were deposited using a radio frequency magnetron co-sputtering system. The temperature coefficient of resistance (TCR) of the VOx:Y… read more here.
Keywords: antireflection layer; vox microbolometers; microbolometers nanomesh; nanomesh antireflection ... See more keywords