Height measurement of microbumps using a white-light triangulation method.
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DOI: 10.1364/ao.449077
Abstract: As the electronic interconnection between chips, microbumps are crucial components in advanced packaging for the demand of better performance and higher packaging density. The height and coplanarity of microbumps are critical to ensure the reliability… read more here.
Keywords: microbumps using; light triangulation; using white; white light ... See more keywords