Performance analysis of microcantilever array sensing
Sign Up to like & getrecommendations! Published in 2017 at "Science China Technological Sciences"
DOI: 10.1007/s11431-016-9104-x
Abstract: Array sensing is increasingly important in the development of microcantilever (MC) sensors, and response consistency is the foundation for MC array sensing. In the present work, we investigated the response consistency of MC array sensing.… read more here.
Keywords: response consistency; array sensing; array; microcantilever ... See more keywords
All-optical dynamic analysis of the photothermal and photoacoustic response of a microcantilever by laser Doppler vibrometry
Sign Up to like & getrecommendations! Published in 2021 at "Photoacoustics"
DOI: 10.1016/j.pacs.2021.100299
Abstract: Light absorption induced thermoelastic and photoacoustic excitation, combined with laser Doppler vibrometry, was utilized to analyze the dynamic mechanical behavior of a microcantilever. The measured frequency response, modal shapes, and acoustic coupling effects were interpreted… read more here.
Keywords: microcantilever; response; analysis; doppler vibrometry ... See more keywords
Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor.
Sign Up to like & getrecommendations! Published in 2022 at "Nano letters"
DOI: 10.1021/acs.nanolett.1c04378
Abstract: A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO… read more here.
Keywords: microcantilever; humidity; resonant microcantilever; self actuated ... See more keywords
Double side nanostructuring of microcantilever sensors with TiO2-NTs as a route to enhance their sensitivity.
Sign Up to like & getrecommendations! Published in 2020 at "Nanoscale"
DOI: 10.1039/d0nr01596b
Abstract: We reported a new strategy to enhance the sensing performances of a commercial microcantilever with optical readout in dynamic mode for the vapor detection of organophosphorus compounds (OPs). In order to increase significantly the surface… read more here.
Keywords: microcantilever; tio2 nts; side; double side ... See more keywords
Overview and Research on Signal Readout Technology of Microcantilever Sensor
Sign Up to like & getrecommendations! Published in 2023 at "Integrated Ferroelectrics"
DOI: 10.1080/10584587.2023.2191516
Abstract: Abstract Since 1986, the first microcantilever applied in atomic force microscope, the device manufacturing technology, driving method and readout technology have improved significantly. In this paper, five readout technologies will be introduced in detail, and… read more here.
Keywords: microcantilever; readout technology; detection; readout ... See more keywords
Integrated Fabrication Process of Si Microcantilever Using TMAH Solution With Planar Molybdenum Mask
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2023.3263530
Abstract: The anisotropic etching release of a silicon microcantilever structure becomes challenging when it has embedded metal layers. We integrated the anisotropic wet silicon etching and etch-back method for the microcantilever releasing process in a silicon-on-insulator… read more here.
Keywords: microcantilever; mask; silicon; metal ... See more keywords
Modeling and Numerical Characterization of High Sensitive Microcantilever Biosensors with Parabolic Piezoresistor
Sign Up to like & getrecommendations! Published in 2018 at "NANO"
DOI: 10.1142/s1793292018500558
Abstract: The biaxial and planar characteristics of surface stress produce a parabolic differential stress distribution inside the sensing zone of microcantilever biosensors, which can be used to design nove... read more here.
Keywords: microcantilever; high sensitive; numerical characterization; modeling numerical ... See more keywords
A V-Shaped Microcantilever Sensor Based on a Gap Method for Real-Time Detection of E. coli Bacteria
Sign Up to like & getrecommendations! Published in 2022 at "Biosensors"
DOI: 10.3390/bios12040194
Abstract: This paper presents a dynamic-mode microcantilever sensor based on a gap method. The sensor has a V-shaped microcantilever and a fixed structure at a distance of 2 µm from its free end. The microcantilever is… read more here.
Keywords: gap; real time; microcantilever; coli bacteria ... See more keywords
A Genosensor Based on the Modification of a Microcantilever: A Review
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14020427
Abstract: When the free end of a microcantilever is modified by a genetic probe, this sensor can be used for a wider range of applications, such as for chemical analysis, biological testing, pharmaceutical screening, and environmental… read more here.
Keywords: microcantilever; application; modification; genetic probe ... See more keywords
An Engineering Method for Resonant Microcantilever Using Double-Channel Excitation and Signal Acquisition Based on LabVIEW
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14040823
Abstract: Resonant microcantilevers have the advantages of ultra-high heating rates, analysis speed, ultra-low power consumption, temperature programming, and trace sample analysis when applied in TGA. However, the current single-channel testing system for resonant microcantilevers can only… read more here.
Keywords: microcantilever; curve sample; heating; program ... See more keywords