Modeling and Numerical Characterization of High Sensitive Microcantilever Biosensors with Parabolic Piezoresistor
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DOI: 10.1142/s1793292018500558
Abstract: The biaxial and planar characteristics of surface stress produce a parabolic differential stress distribution inside the sensing zone of microcantilever biosensors, which can be used to design nove... read more here.
Keywords: microcantilever; high sensitive; numerical characterization; modeling numerical ... See more keywords