Nonlinear dynamic responses of electrostatically actuated microcantilevers containing internal fluid flow
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DOI: 10.1007/s10404-017-1999-z
Abstract: A nonlinear theoretical model for electrostatically actuated microcantilevers containing internal fluid flow is developed in the present study, which takes into account the geometric and electrostatic nonlinearities. A four-degree-of-freedom and eight-dimensional analytical modeling is presented… read more here.
Keywords: microcantilevers containing; actuated microcantilevers; internal fluid; flow ... See more keywords