Deposition of microcrystalline diamond films in H2 microwave plasma with graphite powder as hydrocarbon precursor
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DOI: 10.1016/j.tsf.2018.10.044
Abstract: Abstract We report on high-quality microcrystalline diamond films deposited on Si substrates in microwave hydrogen plasma (without methane feed gas) using graphite powders with different sizes from 2 μm to 150 μm as the carbon source. Hydrocarbon… read more here.
Keywords: spectroscopy; microcrystalline diamond; powder; plasma graphite ... See more keywords