Microelectromechanical system-based electrochemical seismic sensors with an anode and a cathode integrated on one chip
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/27/2/025004
Abstract: This paper presents a microelectromechanical system (MEMS)-based electrochemical seismic sensor with an anode and a cathode integrated on a single chip. The proposed approach decreases the number of requested wafers as the sensing unit from… read more here.
Keywords: anode cathode; microelectromechanical system; based electrochemical; electrochemical seismic ... See more keywords
Mid-infrared silicon photonic phase shifter based on microelectromechanical system.
Sign Up to like & getrecommendations! Published in 2022 at "Optics letters"
DOI: 10.1364/ol.474597
Abstract: Mid-infrared (MIR) photonic integrated circuits have generated considerable interest, owing to their potential applications, such as thermal imaging and biochemical sensing. A challenging area in the field is the development of reconfigurable approaches for the… read more here.
Keywords: phase shifter; shifter; mid infrared; microelectromechanical system ... See more keywords
Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 μm Process
Sign Up to like & getrecommendations! Published in 2021 at "Micromachines"
DOI: 10.3390/mi12060635
Abstract: In this study, a multi-function microelectromechanical system (MEMS) was integrated with a MEMS oscillator, using the resonant frequency oscillation characteristics of the oscillator to provide the Lorentz current of the magnetometer to enhance a large… read more here.
Keywords: system; range; integrating resonator; process ... See more keywords