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   Articles with "microelectromechanical system" as a keyword



Microelectromechanical system-based electrochemical seismic sensors with an anode and a cathode integrated on one chip

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recommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"

DOI: 10.1088/1361-6439/27/2/025004

Abstract: This paper presents a microelectromechanical system (MEMS)-based electrochemical seismic sensor with an anode and a cathode integrated on a single chip. The proposed approach decreases the number of requested wafers as the sensing unit from… read more here.

Keywords: anode cathode; microelectromechanical system; based electrochemical; electrochemical seismic ... See more keywords

Mid-infrared silicon photonic phase shifter based on microelectromechanical system.

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recommendations! Published in 2022 at "Optics letters"

DOI: 10.1364/ol.474597

Abstract: Mid-infrared (MIR) photonic integrated circuits have generated considerable interest, owing to their potential applications, such as thermal imaging and biochemical sensing. A challenging area in the field is the development of reconfigurable approaches for the… read more here.

Keywords: phase shifter; shifter; mid infrared; microelectromechanical system ... See more keywords

Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 μm Process

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recommendations! Published in 2021 at "Micromachines"

DOI: 10.3390/mi12060635

Abstract: In this study, a multi-function microelectromechanical system (MEMS) was integrated with a MEMS oscillator, using the resonant frequency oscillation characteristics of the oscillator to provide the Lorentz current of the magnetometer to enhance a large… read more here.

Keywords: system; range; integrating resonator; process ... See more keywords

Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing

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recommendations! Published in 2024 at "Micromachines"

DOI: 10.3390/mi15121461

Abstract: Microelectromechanical systems (MEMSs) are attracting increasing interest from the scientific community for the large variety of possible applications and for the continuous request from the market to improve performances, while keeping small dimensions and reduced… read more here.

Keywords: microelectromechanical system; resonant devices; devices guide; guide design ... See more keywords