Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
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DOI: 10.3390/mi9090422
Abstract: Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due… read more here.
Keywords: techniques considerations; thin film; microfabrication parylene; microelectromechanical systems ... See more keywords