Method for lateral force calibration in atomic force microscope using MEMS microforce sensor.
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DOI: 10.1016/j.ultramic.2017.06.012
Abstract: In this paper we present a simple and direct method for the lateral force calibration constant determination. Our procedure does not require any knowledge about material or geometrical parameters of an investigated cantilever. We apply… read more here.
Keywords: force calibration; force; lateral force; microforce sensor ... See more keywords