Novel design of microgyroscopes employing electrostatic actuation and resistance-change based sensing
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DOI: 10.1016/j.jsv.2017.09.010
Abstract: Abstract The nonlinear dynamics of a microgyroscope consisting of a vibrating beam with attached proof mass and operating at high frequency is numerically investigated. The working principle of this inertial sensor is based on exploiting… read more here.
Keywords: change; resistance change; novel design; microgyroscopes employing ... See more keywords