Electro-thermal analysis of an Al–Ti multilayer thin film microheater for MEMS thruster application
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3649-5
Abstract: A multilayer thin film aluminum/titanium (Al/Ti) microheater is developed for the microthruster liquid propellant vaporizing and gas heating for increasing the specific impulse. The microheater was fabricated onto a Pyrex 7740 substrate using a Micro-Electro-Mechanical… read more here.
Keywords: microheater; electro thermal; multilayer thin; thin film ... See more keywords
Compact design of an optical phase shifter packaged with IST microheater used for integrated photonics
Sign Up to like & getrecommendations! Published in 2020 at "Results in physics"
DOI: 10.1016/j.rinp.2020.103644
Abstract: Abstract A design of compact optical phase shifter which is constructed by two cascading microring resonators and a corresponding packaged microheater is proposed. We illustrated that the footprint of the compact phase shifter could be… read more here.
Keywords: phase; phase shifter; optical phase; microheater ... See more keywords
In Situ Localized Growth of Ordered Metal Oxide Hollow Sphere Array on Microheater Platform for Sensitive, Ultra-Fast Gas Sensing.
Sign Up to like & getrecommendations! Published in 2017 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.6b12677
Abstract: A simple and versatile strategy is presented for the localized on-chip synthesis of an ordered metal oxide hollow sphere array directly on a low power microheater platform to form a closely integrated miniaturized gas sensor.… read more here.
Keywords: hollow sphere; microheater; oxide hollow; sphere array ... See more keywords