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Published in 2021 at "Journal of Applied Physics"
DOI: 10.1063/5.0033282
Abstract: We demonstrate the transition characteristics and electron kinetics of microdischarges in a microgap with a cathode having microstructures using two-dimensional particle-in-cell/Monte Carlo collision (2d3v) simulations. It is found that the microdischarge is inside the hollow…
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Keywords:
cathode discharges;
cathode;
electron kinetics;
microhollow cathode ... See more keywords
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Published in 2018 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/aaa870
Abstract: Microhollow cathode discharges have been produced on silicon platforms using processes usually used for MEMS fabrication. Microreactors consist of 100 or 150 μm-diameter cavities made from Ni and SiO2 film layers deposited on a silicon…
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Keywords:
cathode discharges;
argon helium;
cathode;
microhollow cathode ... See more keywords