ZnO thin film piezoelectric micromachined microphone with symmetric composite vibrating diaphragm
Sign Up to like & getrecommendations! Published in 2017 at "Smart Materials and Structures"
DOI: 10.1088/1361-665x/aa6ae9
Abstract: Residual stress is an important factor affecting the sensitivity of piezoelectric micromachined microphone. A symmetric composite vibrating diaphragm was adopted in the micro electro mechanical systems piezoelectric microphone to decrease the residual stress and improve… read more here.
Keywords: piezoelectric micromachined; zno; diaphragm; film ... See more keywords