Circular membrane approximation model with the effect of the finiteness of the electrode’s diameter of MEMS capacitive micromachined ultrasonic transducers
Sign Up to like & getrecommendations! Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-016-3184-9
Abstract: In this paper, an analytical model for evaluation of membrane displacement, multiple resonances, mechanical impedances and bandwidth profile of capacitive micromachined ultrasonic transducers (CMUTs) developed by MEMS technology for medical imaging is presented. Improvement in… read more here.
Keywords: finiteness; model; membrane; micromachined ultrasonic ... See more keywords
Dual-frequency piezoelectric micromachined ultrasonic transducers
Sign Up to like & getrecommendations! Published in 2019 at "Applied Physics Letters"
DOI: 10.1063/1.5097624
Abstract: A piezoelectric micromachined ultrasonic transducer (pMUT) operating at dual frequencies (3.75 MHz and 18 MHz) was designed to achieve an ultrasound-on-a-chip solution for next-generation biomedical applications. Optimal electrode configurations for the dual-frequency pMUT were analyzed using… read more here.
Keywords: frequency piezoelectric; dual frequency; piezoelectric micromachined; frequency ... See more keywords
Piezoelectric Micromachined Ultrasonic Transducer Array-Based Electronic Stethoscope for Internet of Medical Things
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Internet of Things Journal"
DOI: 10.1109/jiot.2022.3145863
Abstract: A piezoelectric micromachined ultrasonic transducer (PMUT) array-based smart electronic stethoscope is presented for Internet of Medical Things (IoMT). For the first time, an electronic stethoscope based on a high-performance PMUT array is demonstrated to record… read more here.
Keywords: ultrasonic transducer; micromachined ultrasonic; electronic stethoscope; piezoelectric micromachined ... See more keywords
A Novel Topology for Process Variation-Tolerant Piezoelectric Micromachined Ultrasonic Transducers
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2018.2876384
Abstract: This paper presents a novel architecture for piezoelectric micromachined ultrasonic transducers (PMUT) allowing for a drastic reduction in the impact of process variations on the accuracy of the resonant frequency. At the core of this… read more here.
Keywords: piezoelectric micromachined; topology; process; micromachined ultrasonic ... See more keywords
Piezoelectric Micromachined Ultrasonic Transducers With Pinned Boundary Structure
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.3001560
Abstract: This paper reports the approach to boost the acoustic performances of PMUTs (Piezoelectric Micromachined Ultrasonic Transducers) including vibrational amplitude, acoustic pressure and electromechanical coupling by using the pinning boundary structure. An analytical model is developed… read more here.
Keywords: boundary structure; piezoelectric micromachined; micromachined ultrasonic; ultrasonic transducers ... See more keywords
Piezoelectric Micromachined Ultrasonic Transducer Using Silk Piezoelectric Thin Film
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2018.2816646
Abstract: In this letter, we present for the first time, a successful fabrication and characterization of silk piezoelectric thin film-based piezoelectric micromachined ultrasonic transducer (PMUT). One of the exacting problems in the PMUT research is to… read more here.
Keywords: piezoelectric micromachined; silk piezoelectric; thin film; piezoelectric thin ... See more keywords
Transmitting Sensitivity Enhancement of Piezoelectric Micromachined Ultrasonic Transducers via Residual Stress Localization by Stiffness Modification
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2019.2904293
Abstract: Residual stress dramatically affects the performance of piezoelectric micromachined ultrasonic transducers (pMUTs), in particular, the transmitting sensitivity. This letter presents a novel architecture for pMUTs with V-shaped springs. Stiffness modification achieved by the V-shaped springs… read more here.
Keywords: piezoelectric micromachined; residual stress; transmitting sensitivity; micromachined ultrasonic ... See more keywords
Design and Fabrication of a High-Power Air-Coupled Capacitive Micromachined Ultrasonic Transducer Array With Concentric Annular Cells
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2017.2746006
Abstract: One shortcoming of capacitive micromachined ultrasonic transducers (CMUTs) for commercial use is the weak output power relative to traditional ultrasonic transducers. Recently, we reported an annular CMUT cell with an improved transmit efficiency over a… read more here.
Keywords: array; power; air; concentric annular ... See more keywords
Total-Focus Ultrasonic Imaging of Defects in Solids Using a PZT Piezoelectric Micromachined Ultrasonic Transducer Array
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2020.3032988
Abstract: This work demonstrates the ultrasonic imaging ability of piezoelectric micromachined ultrasonic transducer (PMUT) for the detection of defects deep in solids by total-focus imaging algorithm. The 3-MHz PMUT array uses thin-film PZT as the material… read more here.
Keywords: ultrasonic imaging; array; piezoelectric micromachined; focus ... See more keywords
A Novel Coupled Piezoelectric Micromachined Ultrasonic Transducer Based on Piston Mode
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2021.3090043
Abstract: This article presents a piezoelectric micromachined ultrasonic transducer (pMUT) modified with a piston diaphragm term as piston diaphragm pMUT (PD-pMUT). The transmission sound pressure level (SPL) and the frequency bandwidth of the modified transducer can… read more here.
Keywords: piezoelectric micromachined; pmut; piston; ultrasonic transducer ... See more keywords
A Handheld Imaging Probe for Acoustic Angiography With an Ultrawideband Capacitive Micromachined Ultrasonic Transducer (CMUT) Array
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2022.3172566
Abstract: This article presents an imaging probe with a 256-element ultrawideband (UWB) 1-D capacitive micromachined ultrasonic transducer (CMUT) array designed for acoustic angiography (AA). This array was fabricated on a borosilicate glass wafer with a reduced… read more here.
Keywords: capacitive micromachined; imaging probe; micromachined ultrasonic; cmut ... See more keywords