Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system
Sign Up to like & getrecommendations! Published in 2017 at "Mechanical Sciences"
DOI: 10.5194/ms-8-117-2017
Abstract: Abstract. Flexure-based mechanisms have been widely used for scanning tunneling microscopy, nanoimprint lithography, fast servo tool system and micro/nano manipulation. In this paper, a novel planar micromanipulation stage with large rotational displacement is proposed. The… read more here.
Keywords: stage large; large rotational; micromanipulation stage; rotational displacement ... See more keywords