Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer
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DOI: 10.3390/mi13081281
Abstract: In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained. The sensitivity can be increased by increasing the detection proof mass… read more here.
Keywords: sensitivity; micromechanical resonant; accelerometer; analysis ... See more keywords