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Published in 2019 at "Scientific Reports"
DOI: 10.1038/s41598-019-54024-1
Abstract: Femtosecond laser based 3D nanolithography is a powerful tool for fabricating various functional micro- and nano-objects. In this work we present several advances needed to push it from the laboratory level use to the industrial…
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Keywords:
support free;
micromechanical structures;
size;
free printing ... See more keywords