Articles with "micromirror" as a keyword



Optomagnetic Micromirror Arrays for Mapping Large Area Stiffness Distributions of Biomimetic Materials.

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Published in 2024 at "Small"

DOI: 10.1002/smll.202406389

Abstract: A new device termed "Optomagnetic Micromirror Arrays" (OMA) is demonstrated capable of mapping the stiffness distribution of biomimetic materials across a 5.1 mm × 7.2 mm field of view with cellular resolution. The OMA device… read more here.

Keywords: optomagnetic micromirror; arrays mapping; biomimetic materials; micromirror arrays ... See more keywords

A Modeling Method of Electromagnetic Micromirror in Random Noisy Environment

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Published in 2020 at "IEEE Transactions on Systems, Man, and Cybernetics: Systems"

DOI: 10.1109/tsmc.2018.2822736

Abstract: In this paper, a data-driven modeling method for electromagnetically actuated micromirror in random noisy environment is proposed. In this method, the electromagnetic micromirror is considered as a dynamic system with preceded hysteresis. Then, a linear… read more here.

Keywords: modeling method; noisy environment; random noisy; micromirror ... See more keywords

Barrier Lyapunov Function-Based Output Regulation Control of an Electromagnetic Micromirror With Transient Performance Constraint

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Published in 2022 at "IEEE Transactions on Systems, Man, and Cybernetics: Systems"

DOI: 10.1109/tsmc.2021.3090090

Abstract: This article investigates the controller design problem for an electromagnetic torsional micromirror with guaranteed transient performance constraint. Specifically, the developed solution works under the output regulation framework and utilizes the internal model principle for model… read more here.

Keywords: control; output; transient performance; micromirror ... See more keywords

Transmission-enabled fiber Fabry-Perot cavity based on a deeply etched slotted micromirror.

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Published in 2018 at "Applied optics"

DOI: 10.1364/ao.57.004610

Abstract: In this work, we report the analysis, fabrication, and characterization of an optical cavity built using a Bragg-coated fiber (BCF) mirror and a metal-coated microelectromechanical systems (MEMS) slotted micromirror, where the latter allows transmission output… read more here.

Keywords: transmission enabled; micromirror; optics; cavity ... See more keywords
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Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays

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Published in 2021 at "Micromachines"

DOI: 10.3390/mi12040419

Abstract: Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of… read more here.

Keywords: motion; micromirror; tip tilt; large angle ... See more keywords

Scanning Micromirror Calibration Method Based on PSO-LSSVM Algorithm Prediction

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Published in 2024 at "Micromachines"

DOI: 10.3390/mi15121413

Abstract: Scanning micromirrors represent a crucial component in micro-opto-electro-mechanical systems (MOEMS), with a broad range of applications across diverse fields. However, in practical applications, several factors inherent to the fabrication process and the surrounding usage environment… read more here.

Keywords: calibration method; method based; scanning micromirror; prediction ... See more keywords

Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays

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Published in 2025 at "Micromachines"

DOI: 10.3390/mi16020157

Abstract: This article presents the electrostatic actuation performance of micromirror arrays for intelligent active daylight control and energy management in green buildings using a capacitive–voltage (C-V) measurement technique. In order to understand how geometric hinge parameters,… read more here.

Keywords: studies electrostatically; capacitance voltage; voltage studies; micromirror arrays ... See more keywords