Articles with "micromirror" as a keyword



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A Modeling Method of Electromagnetic Micromirror in Random Noisy Environment

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Published in 2020 at "IEEE Transactions on Systems, Man, and Cybernetics: Systems"

DOI: 10.1109/tsmc.2018.2822736

Abstract: In this paper, a data-driven modeling method for electromagnetically actuated micromirror in random noisy environment is proposed. In this method, the electromagnetic micromirror is considered as a dynamic system with preceded hysteresis. Then, a linear… read more here.

Keywords: modeling method; noisy environment; random noisy; micromirror ... See more keywords
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Barrier Lyapunov Function-Based Output Regulation Control of an Electromagnetic Micromirror With Transient Performance Constraint

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Published in 2022 at "IEEE Transactions on Systems, Man, and Cybernetics: Systems"

DOI: 10.1109/tsmc.2021.3090090

Abstract: This article investigates the controller design problem for an electromagnetic torsional micromirror with guaranteed transient performance constraint. Specifically, the developed solution works under the output regulation framework and utilizes the internal model principle for model… read more here.

Keywords: control; output; transient performance; micromirror ... See more keywords
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Transmission-enabled fiber Fabry-Perot cavity based on a deeply etched slotted micromirror.

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Published in 2018 at "Applied optics"

DOI: 10.1364/ao.57.004610

Abstract: In this work, we report the analysis, fabrication, and characterization of an optical cavity built using a Bragg-coated fiber (BCF) mirror and a metal-coated microelectromechanical systems (MEMS) slotted micromirror, where the latter allows transmission output… read more here.

Keywords: transmission enabled; micromirror; optics; cavity ... See more keywords
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Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays

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Published in 2021 at "Micromachines"

DOI: 10.3390/mi12040419

Abstract: Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of… read more here.

Keywords: motion; micromirror; tip tilt; large angle ... See more keywords