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Published in 2020 at "IEEE Transactions on Systems, Man, and Cybernetics: Systems"
DOI: 10.1109/tsmc.2018.2822736
Abstract: In this paper, a data-driven modeling method for electromagnetically actuated micromirror in random noisy environment is proposed. In this method, the electromagnetic micromirror is considered as a dynamic system with preceded hysteresis. Then, a linear…
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Keywords:
modeling method;
noisy environment;
random noisy;
micromirror ... See more keywords
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Published in 2022 at "IEEE Transactions on Systems, Man, and Cybernetics: Systems"
DOI: 10.1109/tsmc.2021.3090090
Abstract: This article investigates the controller design problem for an electromagnetic torsional micromirror with guaranteed transient performance constraint. Specifically, the developed solution works under the output regulation framework and utilizes the internal model principle for model…
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Keywords:
control;
output;
transient performance;
micromirror ... See more keywords
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Published in 2018 at "Applied optics"
DOI: 10.1364/ao.57.004610
Abstract: In this work, we report the analysis, fabrication, and characterization of an optical cavity built using a Bragg-coated fiber (BCF) mirror and a metal-coated microelectromechanical systems (MEMS) slotted micromirror, where the latter allows transmission output…
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Keywords:
transmission enabled;
micromirror;
optics;
cavity ... See more keywords
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Published in 2021 at "Micromachines"
DOI: 10.3390/mi12040419
Abstract: Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of…
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Keywords:
motion;
micromirror;
tip tilt;
large angle ... See more keywords