Fabrication of spiral inter-digitated terminal (IDT) structure of electroplated gold on quartz substrate and progressive microplasma generation
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DOI: 10.1007/s10854-017-8211-9
Abstract: This paper discussed about the progressive microplasma generation in planar spiral inter-digitated terminal (IDT) structure. The IDT structures (with separation between two adjacent spiral electrodes varied progressively from 30 to 33 µm) are fabricated on quartz… read more here.
Keywords: idt; generation; progressive microplasma; microplasma generation ... See more keywords