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Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa703a
Abstract: In this paper, the uniformity of polymer film etching by an atmospheric pressure He/O2 microplasma jet array (μPJA) is first investigated with different applied voltage. Plasma characteristics of μPJA were recorded by optical discharge images.…
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Keywords:
microplasma jet;
jet array;
microscopy;
surface ... See more keywords