Direct Microrolling Processing on a Silicon Wafer.
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DOI: 10.1002/smll.201701630
Abstract: Although, varieties of micro- to nanoscale fabrication technologies have been invented and refined for silicon (Si) processing because Si is the basic material of integrated circuits, the layouts are based on layer-by-layer approaches, making it… read more here.
Keywords: processing; layer; microrolling processing; processing silicon ... See more keywords