Articles with "microscope mems" as a keyword



MEMS Device for Quantitative In Situ Mechanical Testing in Electron Microscope

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Published in 2017 at "Micromachines"

DOI: 10.3390/mi8020031

Abstract: In this work, we designed a micro-electromechanical systems (MEMS) device that allows simultaneous direct measurement of mechanical properties during deformation under external stress and characterization of the evolution of nanomaterial microstructure within a transmission electron… read more here.

Keywords: quantitative situ; microscope mems; mems device; electron microscope ... See more keywords