Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Real mode
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DOI: 10.1016/j.apsusc.2018.10.149
Abstract: A method is described intended for distributed calibration of a probe microscope scanner consisting in a search for a net of local calibration coefficients (LCCs) in the process of automatic measurement of a standard surface,… read more here.
Keywords: microscope scanner; probe microscope; distributed calibration; scanner ... See more keywords