High-aperture EUV microscope using multilayer mirrors and a 3D reconstruction algorithm based on z-tomography.
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DOI: 10.1364/oe.475032
Abstract: The article is devoted to the development of an EUV microscope using a wavelength of 13.84 nm. Due to the use of a mirror lens with a large numerical aperture, NA = 0.27, and a short depth of… read more here.
Keywords: high aperture; euv microscope; microscope; microscope using ... See more keywords