Micromachined active test structure for scanning thermal microscopy probes characterization
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.02.010
Abstract: In this paper we present the design, technology and application of Si/Si3N4 micro calibration stage equipped with Pt microheaters. This 500nm thick MEMS structure with 4 independently controlled microheaters allows for precise control temperature dissipation… read more here.
Keywords: microscopy; thermal microscopy; microscopy probes; structure ... See more keywords
Utilization of coupled eigenmodes in Akiyama atomic force microscopy probes for bimodal multifrequency sensing
Sign Up to like & getrecommendations! Published in 2022 at "Nanotechnology"
DOI: 10.1088/1361-6528/ac8232
Abstract: Akiyama atomic force microscopy probes represent a unique means of combining several of the desirable properties of tuning fork and cantilever probe designs. As a hybridized mechanical resonator, the vibrational characteristics of Akiyama probes result… read more here.
Keywords: akiyama atomic; microscopy probes; force microscopy; microscopy ... See more keywords