Super-Resolution Three-Dimensional Topography Measurement Using Microsphere-Aided Broadband Light Interferometry
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DOI: 10.1109/access.2024.3470554
Abstract: With the rapid development of the information era and super-precision fabrication technology, micro/nano technology has already become one of the most important modern scientific directions. To quantitatively characterize the defects, uniformity, quality and performances of… read more here.
Keywords: broadband light; topography; microsphere aided; light interferometry ... See more keywords