Hybrid-Phase Microstructural ITO-Stabilized ZnO TFTs With Self-Aligned Coplanar Architecture
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DOI: 10.1109/led.2017.2764505
Abstract: In this letter, hybrid-phase microstructural ITO-stabilized ZnO thin films, which were capped by silane-sourced or tetraethyl-orthosilicate-sourced plasma-enhanced chemical vapor deposition (PECVD) SiO2 layers, were found to present remarkably different resistivity variation after O2 annealing treatment.… read more here.
Keywords: phase microstructural; ito stabilized; microstructural ito; hybrid phase ... See more keywords