On the study of microstructure of annealed C+and H2+ Co_implanted 6H-SiC
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DOI: 10.1016/j.pnucene.2019.103143
Abstract: Abstract The microstructure of annealed single crystal 6H-SiC implanted with C+ and H2+ ions were characterized by glancing incidence X-ray diffraction (GIXRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). After annealing, cracks were… read more here.
Keywords: ions implanted; surface ions; microstructure annealed; microscopy ... See more keywords