Impact of Mo Barrier Layers on the Interface and Microstructure of Al/Sc Multilayers for the Extreme Ultraviolet Range.
Sign Up to like & getrecommendations! Published in 2025 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.4c22676
Abstract: Al/Sc multilayers are potential optical elements to be used for the extreme ultraviolet range at wavelengths longer than the Sc M2,3 absorption edge. The existing research exhibits a significant gap concerning the incorporation of a… read more here.
Keywords: spectroscopy; microstructure multilayers; layers interface; barrier layers ... See more keywords
Comparative Study on Microstructure of Mo/Si Multilayers Deposited on Large Curved Mirror with and without the Shadow Mask
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14030526
Abstract: The Mo/Si multilayer mirror has been widely used in EUV astronomy, lithography, microscopy and other fields because of its high reflectivity at the wavelength around 13.5 nm. During the fabrication of Mo/Si multilayers on large,… read more here.
Keywords: microstructure multilayers; mask; multilayers deposited; shadow mask ... See more keywords