The effects of rapid thermal annealing and microwave annealing on the electrical properties of ZrO2 metal-insulator-metal capacitors
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DOI: 10.1016/j.ijleo.2018.11.048
Abstract: Abstract The effects of different rapid thermal annealing (RTA) and microwave annealing (MWA) on the electrical behaviors of ZrO2 metal-insulator-metal (MIM) capacitors were studied in detail. The maximum capacitance density was achieved at 1400 W for… read more here.
Keywords: thermal annealing; metal insulator; insulator metal; microwave annealing ... See more keywords
Rapid solvo-microwave annealing for optimizing ordered nanostructures and crystallization of regioregular polythiophene-based block copolymers
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DOI: 10.1039/c9py00871c
Abstract: Solvo-microwave annealing is an effective method for producing thin films of polythiophene-based block copolymers with ordered structures and high crystallinity in a very short processing time (∼3 min). read more here.
Keywords: solvo microwave; block copolymers; microwave annealing; based block ... See more keywords
Synergy effect of microwave annealing and high-pressure hydrogen annealing on Poly-Si thin-film transistor
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DOI: 10.1088/1361-6528/ac800c
Abstract: Grain boundary (GB) is a significant factor that deteriorates the transfer characteristics of poly-Si thin-film transistors (TFTs). In this study, we utilized the synergistic effect of microwave annealing (MWA) and high-pressure hydrogen annealing (HPHA) to… read more here.
Keywords: poly thin; thin film; effect; microwave annealing ... See more keywords
Improved Ferroelectric Properties in Hf0.5Zr0.5O2 Thin Films by Microwave Annealing
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DOI: 10.3390/nano12173001
Abstract: In the doped hafnia(HfO2)-based films, crystallization annealing is indispensable in forming ferroelectric phases. In this paper, we investigate the annealing effects of TiN/Hf0.5Zr0.5O2/TiN metal-ferroelectric-metal (MFM) capacitors by comparing microwave annealing (MWA) and rapid thermal annealing… read more here.
Keywords: microwave annealing; 5zr0 5o2; hf0 5zr0; improved ferroelectric ... See more keywords