The effects of rapid thermal annealing and microwave annealing on the electrical properties of ZrO2 metal-insulator-metal capacitors
Sign Up to like & getrecommendations! Published in 2019 at "Optik"
DOI: 10.1016/j.ijleo.2018.11.048
Abstract: Abstract The effects of different rapid thermal annealing (RTA) and microwave annealing (MWA) on the electrical behaviors of ZrO2 metal-insulator-metal (MIM) capacitors were studied in detail. The maximum capacitance density was achieved at 1400 W for… read more here.
Keywords: thermal annealing; metal insulator; insulator metal; microwave annealing ... See more keywords
Rapid solvo-microwave annealing for optimizing ordered nanostructures and crystallization of regioregular polythiophene-based block copolymers
Sign Up to like & getrecommendations! Published in 2019 at "Polymer Chemistry"
DOI: 10.1039/c9py00871c
Abstract: Solvo-microwave annealing is an effective method for producing thin films of polythiophene-based block copolymers with ordered structures and high crystallinity in a very short processing time (∼3 min). read more here.
Keywords: solvo microwave; block copolymers; microwave annealing; based block ... See more keywords
Synergy effect of microwave annealing and high-pressure hydrogen annealing on Poly-Si thin-film transistor
Sign Up to like & getrecommendations! Published in 2022 at "Nanotechnology"
DOI: 10.1088/1361-6528/ac800c
Abstract: Grain boundary (GB) is a significant factor that deteriorates the transfer characteristics of poly-Si thin-film transistors (TFTs). In this study, we utilized the synergistic effect of microwave annealing (MWA) and high-pressure hydrogen annealing (HPHA) to… read more here.
Keywords: poly thin; thin film; effect; microwave annealing ... See more keywords
Structural and optical evolution of compressively strained Ge0.965Sn0.035 films on silicon undergoing microwave annealing
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DOI: 10.1088/1361-6641/ade820
Abstract: Group-IV GeSn alloys have recently attracted considerable attention in silicon photonics owing to their enhanced direct bandgap nature and tunable bandgap energy. However, the performance of GeSn-based photonic devices is strongly dependent on both the… read more here.
Keywords: 035 films; ge0 965sn0; 965sn0 035; microwave annealing ... See more keywords
Microwave Annealing for Enhanced Performance of Flexible MoS2 FET Based on Electromagnetic Losses in Electrode
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2023.3330954
Abstract: In this study, we present a novel microwave annealing (MWA) technique that exploits the electromagnetic loss of metal electrodes as a heat source to enhance the performance of multilayer molybdenum disulfide (MoS2) field-effect transistors (FETs)… read more here.
Keywords: enhanced performance; annealing enhanced; performance; performance flexible ... See more keywords
The Impact of Microwave Annealing on MoS2 Devices Assisted by Neural Network-Based Big Data Analysis
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DOI: 10.3390/ma17133373
Abstract: Microwave annealing, an emerging annealing method known for its efficiency and low thermal budget, has established a foundational research base in the annealing of molybdenum disulfide (MoS2) devices. Typically, to obtain high-quality MoS2 devices, mechanical… read more here.
Keywords: impact microwave; annealing mos2; microwave annealing; neural network ... See more keywords
Controlled Formation of Nanoislands During Microwave Annealing of Au Thin Films
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DOI: 10.3390/met15091030
Abstract: We present a systematic study on the fabrication of gold nanoislands by microwave-assisted annealing, a rapid and energy-efficient alternative to conventional thermal treatments. Gold thin films with nominal thicknesses of 4, 5, 6, 8, and… read more here.
Keywords: controlled formation; nanoislands microwave; thin films; annealing thin ... See more keywords
Improved Ferroelectric Properties in Hf0.5Zr0.5O2 Thin Films by Microwave Annealing
Sign Up to like & getrecommendations! Published in 2022 at "Nanomaterials"
DOI: 10.3390/nano12173001
Abstract: In the doped hafnia(HfO2)-based films, crystallization annealing is indispensable in forming ferroelectric phases. In this paper, we investigate the annealing effects of TiN/Hf0.5Zr0.5O2/TiN metal-ferroelectric-metal (MFM) capacitors by comparing microwave annealing (MWA) and rapid thermal annealing… read more here.
Keywords: microwave annealing; 5zr0 5o2; hf0 5zr0; improved ferroelectric ... See more keywords