Microwave Resistivity of Thermally Oxidized High Resistivity Silicon Wafers
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Electronic Materials"
DOI: 10.1007/s11664-017-5636-0
Abstract: We used a microwave dielectric resonator to study how the process of thermal oxidation of high resistivity silicon wafers reduces the wafer microwave resistivity. Measurements were performed before surface thermal oxidation, after the oxidation, and… read more here.
Keywords: resistivity; microwave resistivity; high resistivity; resistivity silicon ... See more keywords