Monolithically integrated membrane-in-the-middle cavity optomechanical systems.
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DOI: 10.1364/oe.402031
Abstract: We describe curved-mirror Fabry-Perot cavities with embedded silicon nitride membranes, fabricated using a monolithic surface-micromachining process. The presence of the suspended membranes was confirmed by confocal microscopy, and their properties were verified through optical studies… read more here.
Keywords: cavity optomechanical; integrated membrane; membrane middle; cavity ... See more keywords