Conduction mechanisms and charge trapping control in SiO2 nanoparticle MIM capacitors
Sign Up to like & getrecommendations! Published in 2020 at "Electrochimica Acta"
DOI: 10.1016/j.electacta.2020.136202
Abstract: Abstract The objective of this paper is to present a charge trapping control method for MIM capacitors in which the dielectric is made of electrospray-deposited silica nanoparticles. The influence of the bias voltage on the… read more here.
Keywords: conduction mechanisms; trapping control; control; charge trapping ... See more keywords
MIM capacitors as simple test vehicles for the DC/AC characterization of ALD-Al2O3 with auto-correction of parasitic inductance
Sign Up to like & getrecommendations! Published in 2020 at "Microelectronics Reliability"
DOI: 10.1016/j.microrel.2019.113516
Abstract: Abstract Metal-insulator-metal capacitors were used for determining the DC and frequency-dependent characteristics of ultra-thin Al2O3 (Thox = 22 nm). For this purpose, a state-of-the-art insulating layer was formed using atomic deposition, which enables enhanced performance of devices and… read more here.
Keywords: simple test; test vehicles; frequency; mim capacitors ... See more keywords