Humidity Control for Front Opening Unified Pod after Opening Its Door in a Mini-Environment
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DOI: 10.3390/app8071149
Abstract: Wafers are usually placed in a front opening unified pod (FOUP) while waiting in the line of manufacturing processes; a conventional way for preventing (or removing) contamination is to purge an FOUP with a gas,… read more here.
Keywords: panel purge; air; mini environment; purge ... See more keywords