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Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.2992491
Abstract: We present an overview of the emerging and enabling miniature MEMS-based components for the terahertz frequencies. The usage of miniature MEMS integrated within the terahertz components is an uprising field of research, which offers reconfigurability,…
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Keywords:
mems novel;
reconfigurability;
key components;
miniature ... See more keywords