A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure
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DOI: 10.3390/mi13101608
Abstract: This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a… read more here.
Keywords: topology; cantilever; miniaturized piezoelectric; piezoelectric mems ... See more keywords