Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11 nm.
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DOI: 10.1364/oe.448069
Abstract: The results of the investigation of the reflective characteristics of multilayer mirrors based on Ru/Y are presented. Reflection coefficients at the level of 38.5% at an operating wavelength of 9.4 nm. It is shown that… read more here.
Keywords: multilayer; spectral range; multilayer mirrors; mirrors spectral ... See more keywords